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ZF350 Organic-Inorganic Co-Preparation Coating Instrument

This device features a Φ350×450mm stainless steel front-opening vacuum chamber, equipped with an independent organic evaporation source (5ml capacity) and a 400℃ temperature control system. The sample stage supports rotation at 0-30rpm and heating from room temperature to 400℃. It is equipped with interlock protection for water and power disconnection and an alarm for misoperation, making it suitable for the preparation and research of high-quality organic-inorganic composite films.

Details

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1. Overview of Equipment and Application Fields

The ZF350 Organic-Inorganic Combined Coating System is a high-end vacuum evaporation apparatus specifically engineered for producing thin films of organic materials, organic-inorganic complexes, and specialized inorganic materials. Optimized for the temperature-sensitive and prone-to-decomposition properties of organic materials, this system delivers precise evaporation control from low to medium-high temperatures. Widely utilized in the research and development of organic optoelectronic materials (OLED, OPV), perovskite precursors, metal-organic frameworks (MOFs), and novel composite functional films, it serves as a core experimental platform for cutting-edge material exploration in academic institutions and research laboratories.

2. Core Functional Highlights

· The dedicated organic evaporation source system features an independent 5ml organic source evaporation unit, specifically engineered for powdered or granular organic materials. The evaporation source integrates high-precision temperature measurement and control modules, offering a wide heating range up to 400°C with 0.5kW power output. This ensures stable evaporation of organic materials at optimal sublimation temperatures while preventing overheating decomposition.

· The unique upward evaporation architecture adopts a vertical layout design of "bottom source, top sample": the evaporation source is installed at the bottom of the vacuum chamber, while the sample holder is mounted on the top cover. This upward evaporation structure effectively utilizes gravitational force, reducing the risk of large particle impurities falling onto the substrate surface, thereby significantly improving film purity and deposition quality.

· Multi-functional Sample Stage and High Temperature Baking

o Uniform coating: The sample holder supports stepless speed adjustment from 0 to 30 rpm, effectively improving the thickness uniformity of large-area (Φ100mm) coatings.

o In-situ baking: The sample stage is equipped with a powerful baking heating function, with a temperature range adjustable from room temperature to **400°C**, and is fitted with a precision temperature measurement and control system. Users can perform high-temperature degassing of the substrate before coating or conduct in-situ annealing during the coating process to optimize crystal growth and interfacial bonding strength.

· High Vacuum and Front Door Design

o Vacuum performance: The system employs a combined molecular pump and mechanical pump for vacuum extraction, achieving a maximum vacuum level of **6×10⁻⁴ Pa** in the coating chamber with a system leakage rate of 1×10⁻⁷ Pa·L/s, ensuring a low-oxygen and low-humidity environment for organic materials.

o User-friendly operation: The vacuum chamber measures approximately Φ350×450mm, featuring a cylindrical front-opening design with an anti-contamination plate inside. This facilitates quick sample loading/unloading and maintenance, while effectively protecting the chamber walls from contamination.

· Comprehensive safety interlock protection. The device features multiple intelligent safety protection mechanisms:

o Power and water cut-off protection: Continuously monitors cooling water and power supply status, automatically triggers alarms and cuts off heating power when abnormalities occur to prevent equipment damage.

o Error-proofing protection: The logic interlock design prevents accidental activation of the evaporation source when vacuum level is insufficient or temperature is not met, ensuring experimental safety.

o Manual magnetic control baffle: The evaporation source outlet is equipped with a manual magnetic control baffle, featuring simple operation and reliable performance to precisely regulate the start and stop timing of the coating process.

3. Technical Parameters and Specifications

Parameter item

qualification

vacuum chamber

Size: Φ350 mm × 450 mm

Material: Stainless steel

Structure: Cylindrical, front-opening door design, with built-in anti-fouling plate

vacuum performance

Extreme vacuum: 6×10⁻⁴ Pa

System leakage rate: 1×10⁻⁷ Pa·L/s

Extraction system: combination of molecular pump and mechanical pump

evaporation source system

Type: Dedicated organic source (compatible with inorganic)

Volume: 5 ml

Heating power: 0.5 kW

Temperature control range: room temperature to 400°C (temperature measurement and control available)

Installation location: bottom of the vacuum chamber (upward evaporation)

Baffle control: manual magnetic control

sample holder system

Sample size: Maximum support Φ100 mm (e.g., slides)

Rotation speed: 0 to 30 rpm (adjustable)

Heating function: Room temperature to 400°C (temperature measurable and controllable)

Installation location: vacuum chamber top cover

security guard

water cut-off protection, power cut-off protection, interlock alarm, misoperation protection

supplementary system

water cooling system (protective pump group and chamber)

electronic control system

Integrated electronic control cabinet with temperature display, speed regulation, vacuum level monitoring, and safety alarm functions

4. Typical Application Scenarios

· Research and development of organic optoelectronic devices: Preparation of OLED light-emitting layers, charge transport layers, and active layers for organic solar cells.

· Organic-inorganic hybrid materials: deposited perovskite films, metal-organic framework (MOF) coatings, and coordination polymer films.

· High-temperature substrate treatment: It is necessary to perform high-temperature degassing before deposition or in-situ crystallization growth during the deposition process.

· High-precision thin film deposition for small areas: Suitable for high-quality single or multi-layer film preparation on substrates up to Φ100mm.

· Teaching and Mechanism Research: Intuitive demonstration of the principle of upward evaporation and the thermal evaporation characteristics of organic materials, suitable for graduate experimental teaching.

5. Why choose ZF350?

The ZF350 Organic-Inorganic Integrated Coating System distinguishes itself through its specialized optimization for organic materials. Its precision temperature control at 400°C meets the sublimation requirements of most organic small molecules and complexes. The combination of an upward-evaporation structure and front-opening design ensures both film purity and operational convenience. Equipped with in-situ high-temperature baking and multiple safety interlocks, the ZF350 is more than just a deviceit serves as your trusted partner in exploring organic electronics and novel composite materials, enabling you to construct perfect thin-film structures in the microscopic realm.